[I-7-1] Deep level characterization of MOVPE-grown AlGaN with high Al compositions

S. Okuzaki¹、K. Sugawara¹、H. Taketomi²、H. Miyake²、K. Hiramatsu²、T. Hashizume¹ (1.Hokkaido Univ.、2.Mie Univ. , Japan)

https://doi.org/10.7567/SSDM.2010.I-7-1