[I-7-1] Deep level characterization of MOVPE-grown AlGaN with high Al compositions

S. Okuzaki¹, K. Sugawara¹, H. Taketomi², H. Miyake², K. Hiramatsu², T. Hashizume¹ (1.Hokkaido Univ., 2.Mie Univ. , Japan)

https://doi.org/10.7567/SSDM.2010.I-7-1