[I-8-5] In-situ observation of polycrystalline Si thin films grown using Al-doped ZnO on glass substrate by the aluminum-induced crystallization

M. Jung¹、A. Okada²、T. Saito²、T. Suemasu²、N. Usami¹ (1.Tohoku Univ.、2.Univ. of Tsukuba , Japan)

https://doi.org/10.7567/SSDM.2010.I-8-5