[K-5-3] Kinetics of strain relaxation in lattice-mismatched In_xGa_1-xAs/GaAs heteroepitaxy

T. Sasaki¹、H. Suzuki²、M. Takahasi³、S. Fujikawa³、I. Kamiya¹、Y. Ohshita¹、M. Yamaguchi¹ (1.Toyota Tech. Inst.、2.Univ. of Miyazaki、3.JAEA , Japan)

https://doi.org/10.7567/SSDM.2010.K-5-3