[L-2-1] Advanced Silicon Integration Technologies for Lab-on-Chip and Implantable Device Applications

C. V. Hoof^1,2, M. O. D. Beeck¹ (1.IMEC, 2.Katholieke Univ. Leuven , Belgium)

https://doi.org/10.7567/SSDM.2010.L-2-1