The Japan Society of Applied Physics

[L-3-3] Positional control of crystal grains in silicon thin film utilizing cage shaped protein

Y. Tojo1, A. Miura1,2, I. Yamashita1,3,4, Y. Uraoka1,4 (1.NAIST , Japan, 2.National Chiao Tung Univ. , Taiwan, 3.Panasonic Corp., 4.CREST , Japan)

https://doi.org/10.7567/SSDM.2010.L-3-3