[L-3-3] Positional control of crystal grains in silicon thin film utilizing cage shaped protein

Y. Tojo¹、A. Miura^1,2、I. Yamashita^1,3,4、Y. Uraoka^1,4 (1.NAIST , Japan、2.National Chiao Tung Univ. , Taiwan、3.Panasonic Corp.、4.CREST , Japan)

https://doi.org/10.7567/SSDM.2010.L-3-3