[L-3-5] Optical Characteristics of Two-dimensional Array of Si Nano-disks Fabricated by Defect-free Neutral Beam Etching with Bio-template

C. H. Huang^1,4, M. Igarashi^1,4, M. F. Budiman¹, R. Oshima^2,4, I. Yamashita^3,4, Y. Okada^2,4, S. Samukawa^1,4 (1.Tohoku Univ., 2.Univ. of Tokyo, 3.NAIST, 4.CREST , Japan)

https://doi.org/10.7567/SSDM.2010.L-3-5