Optical Characteristics of Two-dimensional Array of Si Nano-disks Fabricated by Defect-free Neutral Beam Etching with Bio-template

C. H. Huang; M. Igarashi; M. F. Budiman; R. Oshima; I. Yamashita; Y. Okada; S. Samukawa

doi:https://doi.org/10.7567/SSDM.2010.L-3-5

[L-3-5] Optical Characteristics of Two-dimensional Array of Si Nano-disks Fabricated by Defect-free Neutral Beam Etching with Bio-template

C. H. Huang^1,4、M. Igarashi^1,4、M. F. Budiman¹、R. Oshima^2,4、I. Yamashita^3,4、Y. Okada^2,4、S. Samukawa^1,4 (1.Tohoku Univ.、2.Univ. of Tokyo、3.NAIST、4.CREST , Japan)

https://doi.org/10.7567/SSDM.2010.L-3-5

2010 International Conference on Solid State Devices and Materials

[L-3-5] Optical Characteristics of Two-dimensional Array of Si Nano-disks Fabricated by Defect-free Neutral Beam Etching with Bio-template