The Japan Society of Applied Physics

[P-1-17] A Novel Hot DI Water Rinse on SOD Filled Self-Aligned Shallow Trench Isolation for Highly Reliable NAND Flash Memory

C. H. Liu1、Y. M. Lin1、R. T. Peng1、H. C. Wei1、H. J. Chien1、Y. T. Chiu1、L. T. Kuo1、H. P. Hwang1、M. S. Lee1、S. Pittikoun1 (1.Powerchip Semiconductor Corp. , Taiwan)

https://doi.org/10.7567/SSDM.2010.P-1-17