The Japan Society of Applied Physics

[P-1-20] Strain and stress tensor evaluation in global and local strained-Si by electron back scattering pattern

M. Tomita1, D. Kosemura1,2, M. Takei1, K. Nagata1, H. Akamatsu1, A. Ogura1 (1.Meiji Univ., 2.Research Fellow of the JSPS , Japan)

https://doi.org/10.7567/SSDM.2010.P-1-20