[P-1-20] Strain and stress tensor evaluation in global and local strained-Si by electron back scattering pattern

M. Tomita¹, D. Kosemura^1,2, M. Takei¹, K. Nagata¹, H. Akamatsu¹, A. Ogura¹ (1.Meiji Univ., 2.Research Fellow of the JSPS , Japan)

https://doi.org/10.7567/SSDM.2010.P-1-20