[P-1-20] Strain and stress tensor evaluation in global and local strained-Si by electron back scattering pattern

M. Tomita¹、D. Kosemura^1,2、M. Takei¹、K. Nagata¹、H. Akamatsu¹、A. Ogura¹ (1.Meiji Univ.、2.Research Fellow of the JSPS , Japan)

https://doi.org/10.7567/SSDM.2010.P-1-20