[P-1-21] Development of an STM simulator for quantitative dopant profiling

M. Nishizawa^1,2, L. Bolotov², T. Tada^1,2, H. Fukutome², H. Arimoto², T. Kanayama^1,2 (1.MIRAI-AIST, 2.NIRC-AIST , Japan)

https://doi.org/10.7567/SSDM.2010.P-1-21