[P-1-23L] Momentum Transfer Implantation for Sidewall Doping of FinFET's

G. Fuse¹, M. Sugitani¹, H. Matsushita¹, H. Murooka¹, M. Kuriyama², M. Tanaka² (1.SEN corporation, 2.Sumitomo Heavy Industry , Japan)

https://doi.org/10.7567/SSDM.2010.P-1-23L