The Japan Society of Applied Physics

2010 International Conference on Solid State Devices and Materials

2010 International Conference on Solid State Devices and Materials

Sep 21, 2010 - Sep 24, 2010
The University of Tokyo, Tokyo, Japan

[P-1-24L] MIM Capacitors with Stacked TiO2/Y2O3 Insulator Featuring High Capacitance Density and Low Leakage Current

C. C. Lin1, Y. C. Hu1, L. L. Chen1, M. L. Wu1, J. R. Wu1, Y. H. Wu1 (1.National Tsing Hua Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2010.P-1-24L