[P-1-6] Effects of Al Incorporation into Pr-oxides Formed by Atomic Layer Deposition

K. Furuta¹, W. Takeuchi¹, M. Sakashita¹, K. Kato¹, H. Kondo¹, O. Nakatsuka¹, S. Zaima¹ (1.Nagoya Univ. , Japan)

https://doi.org/10.7567/SSDM.2010.P-1-6