[P-1-6] Effects of Al Incorporation into Pr-oxides Formed by Atomic Layer Deposition

K. Furuta¹、W. Takeuchi¹、M. Sakashita¹、K. Kato¹、H. Kondo¹、O. Nakatsuka¹、S. Zaima¹ (1.Nagoya Univ. , Japan)

https://doi.org/10.7567/SSDM.2010.P-1-6