The Japan Society of Applied Physics

[P-1-9] The Influence of La and Zr Doping on TDDB Characteristics of HfO2 Thin Films

H. W. Chen1, C. H. Liu2, S. Y. Chen1, Y. W. Liao1, H. W. Hsu1, H. S. Huang1, L. W. Cheng3 (1.National Taipei Univ. of Tech., 2.National Taiwan Normal Univ., 3.UMC , Taiwan)