[P-1-9] The Influence of La and Zr Doping on TDDB Characteristics of HfO₂ Thin Films

H. W. Chen¹, C. H. Liu², S. Y. Chen¹, Y. W. Liao¹, H. W. Hsu¹, H. S. Huang¹, L. W. Cheng³ (1.National Taipei Univ. of Tech., 2.National Taiwan Normal Univ., 3.UMC , Taiwan)

https://doi.org/10.7567/SSDM.2010.P-1-9