[P-10-1] A stacked organic/inorganic vapor barrier structure encapsulated flexible plastic substrates prepared using plasma-enhanced chemical vapor deposition

M. S. Jeng¹、C. S. Chuang²、L. W. Lai²、B. Y. Lin¹、D. S. Liu¹ (1.National Formosa Univ.、2.Indus. Tech. Res. Inst. , Taiwan)

https://doi.org/10.7567/SSDM.2010.P-10-1