Effects of pore on dielectric constants of films deposited by PECVD

2010 International Conference on Solid State Devices and Materials

Sep 21, 2010 - Sep 24, 2010
The University of Tokyo, Tokyo, Japan

S. Park¹, K. Kim¹, C. Gong¹, N. Lee¹, Y. Kwon¹, D. Lee¹, M. Kim² (1.R&D Center ATTO.Co,.Ltd, 2.Air Products and chemicals Korea Manufac. , Korea)