Novel Reference Electrode-Insulator-Nitride-Oxide-Semiconductor (RINOS) Structure with Sm<sub>2</sub>O<sub>3</sub> Sensing Membrane for pH-sensor Application

2010 International Conference on Solid State Devices and Materials

Sep 21, 2010 - Sep 24, 2010
The University of Tokyo, Tokyo, Japan

H. Y. Shih¹, J. C. Wang¹, T. F. Lu¹, C. S. Lai¹, C. H. Kao¹, T. M. Pan¹ (1.Chang Gung Univ. , Taiwan)