[P-14-4] Material Research on High Quality Passivation Layers with Controlled Fixed Charge for Crystalline Silicon Solar Cells

T. Tachibana¹, T. Sameshima¹, Y. Iwashita^1,2, Y. Kiyota^1,2, T. Chikyow², H. Yoshida^3,4, K. Arafune^3,4, S. Satoh^3,4, A. Ogura^1,4 (1.Meiji Univ., 2.NIMS, 3.Univ. of Hyogo, 4.CREST-JST , Japan)

https://doi.org/10.7567/SSDM.2010.P-14-4