[P-3-20] High Specific Contact Resistance of Ohmic Contacts to n-Ge Source/Drain and Low Transport Characteristics of Ge nMOSFETs

J. Oh¹, J. Huang¹, Y. T. Chen², I. Ok¹, K. Jeon³, S. H. Lee², B. Sassman¹, W. Y. Loh¹, H. D. Lee⁴, D. H. Ko⁵, P. D. Kirsch¹, R. Jammy¹ (1.SEMATECH, 2.Univ. of Texas at Austin, 3.Univ. of California Berkeley , USA, 4.Chungnam Nat'l Univ., 5.Yonsei Univ. , Korea)

https://doi.org/10.7567/SSDM.2010.P-3-20