[P-6-1] Characterization of SiGe Thin Films Deposited by RF Magnetron Sputtering for Infrared Imaging Sensor

K. Yamaki¹, S. Sekino², T. Tai¹, S. Nakamura², T. Yoshitake², A. Furukawa¹ (1.Tokyo Univ. of Sci., 2.NEC Corp. , Japan)

https://doi.org/10.7567/SSDM.2010.P-6-1