[P-7-20] Mach-Zehnder Electro-Optic Modulator Fabricated on Silicon-on-Insulator (SOI) Substrate Based on the Multimode Interference (MMI) Effect

R. W. Chuang^1,3, M. T. Hsu¹, Y. C. Chang¹, S. H. Chou³, Y. J. Lee² (1.National Cheng Kung Univ., 2.National Nano Device Laboratories, Hsinchu City, 3.National Nano Device Laboratories, Tainan , Taiwan)

https://doi.org/10.7567/SSDM.2010.P-7-20