Dry Etching of Al-rich Al<sub>x</sub>Ga<sub>1-x</sub>As Holes with High Aspect Ratio for Photonic Crystal Fabrication

2010 International Conference on Solid State Devices and Materials

Sep 21, 2010 - Sep 24, 2010
The University of Tokyo, Tokyo, Japan

M. Mochizuki¹, T. Nakajima¹, D. Satoi¹, F. Ishikawa¹, M. Kondow¹, M. Hara¹, H. Aoki¹ (1.Osaka Univ. , Japan)