[P-8-5] Zinc oxide (ZnO) grown by Vertical-Plasma-Enhanced Metal Organic Chemical Vapor Deposition (VPEMOCVD)

P. H. Lei¹, H. F. Kao¹, F. S. Juang¹, X. M. Wu¹ (1.National Formosa Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2010.P-8-5