[P-9-11] Monolithic Integration of Ni-SPC Poly-Si TFTs and Lateral Large-grained Poly-Si TFTs

A. Hara¹、K. Kondo¹、T. Sato¹ (1.Tohoku Gakuin Univ. , Japan)

https://doi.org/10.7567/SSDM.2010.P-9-11