The Japan Society of Applied Physics

[P-9-6] Improved Characteristics of MOCVD Grown ZnO TFTs by Controlling VI/II Ratio of ZnO Film Growth and Using a Modified TFT Layer Structure

K. Remashan1, Y. S. Choi1, S. J. Park1, J. H. Jang1 (1.GIST , Korea)

https://doi.org/10.7567/SSDM.2010.P-9-6