Effects of Plasma-PH3 passivation on Mobility Degradation Mechanisms and Current Conduction Mechanisms of In0.53Ga0.47As N-MOSFET

2011 International Conference on Solid State Devices and Materials

Sep 27, 2011 - Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

A. B. S. Sumarlina^1,2, H. J. Oh¹, A. Du², S. J. Lee¹ (1.National Univ. of Singapore, 2.GLOBALFOUNDRIES Singapore Pte.Ltd. , Singapore)