[A-8-6] Fabrication and analysis of AlN/GaAs(001) metal-insulator-semiconductor structure

M. Kudo¹, H. A. Shih¹, M. Akabori¹, T. Suzuki¹ (1.JAIST , Japan)

https://doi.org/10.7567/SSDM.2011.A-8-6