Antireflective Protective Coating by Ion-Assisted Vapor Deposition Polymerization of Fluoropolymer Thin Films

2011 International Conference on Solid State Devices and Materials

Sep 27, 2011 - Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

K. Senda^1,2, T. Matsuda², K. Tanaka², H. Usui² (1.Sumitomo Precision Products Co., Ltd., 2.Tokyo Univ. Agrical & Tech. , Japan)