The Japan Society of Applied Physics

2011 International Conference on Solid State Devices and Materials

2011 International Conference on Solid State Devices and Materials

Sep 27, 2011 - Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

[C-3-1] Improvement of thermal stability in High Density Ta2O5 3D capacitor by additional thin SiO2 layer

M. Detalle1, H. Dekkers1, G. Potoms1, A. Phommahaxay1, D. S. Tezcan1, P. Soussan1, G. Beyer1 (1.IMEC , Belgium)

https://doi.org/10.7567/SSDM.2011.C-3-1