[C-4-2] Characterization of Patterned SiOC film by STEM-VEELS at Lower (80kV) Acceralation Energy

Y. Otsuka¹, Y. Shimizu¹, T. Naijou¹, S. Ogawa² (1.Toray Research Center Inc., 2.AIST , Japan)

https://doi.org/10.7567/SSDM.2011.C-4-2