[C-4-2] Characterization of Patterned SiOC film by STEM-VEELS at Lower (80kV) Acceralation Energy

Y. Otsuka¹、Y. Shimizu¹、T. Naijou¹、S. Ogawa² (1.Toray Research Center Inc.、2.AIST , Japan)

https://doi.org/10.7567/SSDM.2011.C-4-2