The Japan Society of Applied Physics

[C-8-2] Stress from Tungsten-Filled TSVs Measured by Raman Spectroscopy on Cross-Sectional Samples

J. Gambino1、D. Vanslette1、B. Webb1、C. Luce1、G. Chrisman1、T. Ueda2、T. Ishigaki2、K. Kang2、W. S. Yoo2 (1.IBM、2.WaferMasters, Inc. , USA)

https://doi.org/10.7567/SSDM.2011.C-8-2