Size and Deformation Mode Dependencies on the Strength of Dry-Etched Single Crystal Silicon Micro-Beams

T. Namazu; H. Yamagiwa; T. Fujii; M. Saito; K. Yamada; T. Miyatake

doi:https://doi.org/10.7567/SSDM.2011.C-8-4

2011 International Conference on Solid State Devices and Materials

Sep 27, 2011 - Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

[C-8-4] Size and Deformation Mode Dependencies on the Strength of Dry-Etched Single Crystal Silicon Micro-Beams

T. Namazu^1,2, H. Yamagiwa¹, T. Fujii¹, M. Saito³, K. Yamada³, T. Miyatake³ (1.Univ. of Hyogo, 2.PRESTO-JST, 3.Panasonic Electric Works Co., Ltd. , Japan)

https://doi.org/10.7567/SSDM.2011.C-8-4

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