[C-8-4] Size and Deformation Mode Dependencies on the Strength of Dry-Etched Single Crystal Silicon Micro-Beams

T. Namazu^1,2、H. Yamagiwa¹、T. Fujii¹、M. Saito³、K. Yamada³、T. Miyatake³ (1.Univ. of Hyogo、2.PRESTO-JST、3.Panasonic Electric Works Co., Ltd. , Japan)

https://doi.org/10.7567/SSDM.2011.C-8-4