[D-7-1] Extremely Thin SOI (ETSOI) - a Planar CMOS Technology for System-on-chip Applications

K. Cheng¹、A. Khakifirooz¹、P. Kulkarni¹、S. Ponoth¹、B. Haran¹、A. Kumar¹、T. Adam¹、A. Reznicek¹、N. Loubet²、H. He¹、J. Kuss¹、M. Wang¹、T. M. Levin¹、F. Monsieur²、Q. Liu²、R. Sreenivasan¹、J. Cai¹、A. Kimball¹、S. Mehta¹、S. Luning³、Y. Zhu¹、Z. Zhu¹、T. Yamamoto⁴、A. Bryant¹、C. H. Lin¹、S. Naczas¹、H. Jagannathan¹、L. F. Edge¹、S. Allegret-Maret²、A. Dube¹、S. Kanakasabapathy¹、S. Schmitz¹、A. Inada⁴、S. Seo¹、M. Raymond³、Z. Zhang¹、A. Yagishita⁵、J. Demarest¹、J. Li¹、M. Hopstaken¹、N. Berliner¹、A. Upham¹、R. Johnson¹、S. Holmes¹、T. Standaert¹、M. Smalley¹、N. Zamdmer¹、Z. Ren¹、T. Nagumo⁴、 T. Wu, H. Bu, V. Paruchuri, D. Sadana, V. Narayanan, W. Haensch, J. O'Neill, T. Hook, M. Khare, G. Shahidi, B. Doris¹ (1.IBM、2.STMicroelectronics、3.GLOBALFOUNDRIES、4.Renesas、5.Toshiba , USA)

https://doi.org/10.7567/SSDM.2011.D-7-1