The Japan Society of Applied Physics

[D-7-1] Extremely Thin SOI (ETSOI) - a Planar CMOS Technology for System-on-chip Applications

K. Cheng1、A. Khakifirooz1、P. Kulkarni1、S. Ponoth1、B. Haran1、A. Kumar1、T. Adam1、A. Reznicek1、N. Loubet2、H. He1、J. Kuss1、M. Wang1、T. M. Levin1、F. Monsieur2、Q. Liu2、R. Sreenivasan1、J. Cai1、A. Kimball1、S. Mehta1、S. Luning3、Y. Zhu1、Z. Zhu1、T. Yamamoto4、A. Bryant1、C. H. Lin1、S. Naczas1、H. Jagannathan1、L. F. Edge1、S. Allegret-Maret2、A. Dube1、S. Kanakasabapathy1、S. Schmitz1、A. Inada4、S. Seo1、M. Raymond3、Z. Zhang1、A. Yagishita5、J. Demarest1、J. Li1、M. Hopstaken1、N. Berliner1、A. Upham1、R. Johnson1、S. Holmes1、T. Standaert1、M. Smalley1、N. Zamdmer1、Z. Ren1、T. Nagumo4、 T. Wu, H. Bu, V. Paruchuri, D. Sadana, V. Narayanan, W. Haensch, J. O'Neill, T. Hook, M. Khare, G. Shahidi, B. Doris1 (1.IBM、2.STMicroelectronics、3.GLOBALFOUNDRIES、4.Renesas、5.Toshiba , USA)

https://doi.org/10.7567/SSDM.2011.D-7-1