[E-7-2] Evaluation of Anisotropic Strain Relaxation in SSOI Nanostructure by Oil-Immersion Raman Spectroscopy

D. Kosemura¹, M. Tomita¹, K. Usuda², A. Ogura¹ (1.Meiji Univ., 2.AIST , Japan)

https://doi.org/10.7567/SSDM.2011.E-7-2