[E-7-2] Evaluation of Anisotropic Strain Relaxation in SSOI Nanostructure by Oil-Immersion Raman Spectroscopy

D. Kosemura¹、M. Tomita¹、K. Usuda²、A. Ogura¹ (1.Meiji Univ.、2.AIST , Japan)

https://doi.org/10.7567/SSDM.2011.E-7-2