[E-7-4] Characterization of strain and crystallinity in patterned embedded Silicon Germanium structures

S. Mochizuki¹, A. Madan², A. Pofelski³, A. G. Domenicucci², P. L. Flaitz², J. Li², Y. Y. Wang², T. Pinto², C. W. Lai⁴, J. R. Holt², E. C. T. Harley², M. W. Stoker², A. Reznicek², D. Schepis², V. Paruchuri² (1.Renesas Electronics, 2.IBM, 3.STMicroelectronics, 4.GLOBALFOUNDRIES Singapore , USA)

https://doi.org/10.7567/SSDM.2011.E-7-4