The Japan Society of Applied Physics

[F-4-3] Direct Comparison of Electrical Charaeteristics for Double-Gate and Tri-Gate Flash Memories

Y. X. Liu1, T. Kamei2, T. Matsukawa1, K. Endo1, S. O'uchi1, J. Tsukada1, H. Yamauchi1, Y. Ishikawa1, T. Hayashida2, K. Sakamoto1, A. Ogura2, M. Masahara1,2 (1.AIST, 2.Meiji Univ. , Japan)

https://doi.org/10.7567/SSDM.2011.F-4-3