Robust Data Retention and Superior Endurance SONOS Nonvolatile Memory with NH<sub>3</sub> Plasma Treated and Pd NCs Embedded Charge Storage Layer

2011 International Conference on Solid State Devices and Materials

Sep 27, 2011 - Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

S. H. Liu¹, W. L. Yang¹, S. T. Chen¹, M. R. Ye¹, T. S. Chao² (1.Feng Chia Univ., 2.National Chiao Tung Univ. , Taiwan)