The Japan Society of Applied Physics

[F-5-3] Robust Data Retention and Superior Endurance SONOS Nonvolatile Memory with NH3 Plasma Treated and Pd NCs Embedded Charge Storage Layer

S. H. Liu1、W. L. Yang1、S. T. Chen1、M. R. Ye1、T. S. Chao2 (1.Feng Chia Univ.、2.National Chiao Tung Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2011.F-5-3