Fabricating a 2D Array of &#981;6-nm, High Density (1.2&#215;10<sup>12</sup> cm<sup>-2</sup>), and Periodic Silicon-Nanodisk Structures and Its Optical Characteristics for Solar Cells

M. F. Budiman; M. Igarashi; K. M. Itoh; I. Yamashita; W. Hu; S. Samukawa

doi:https://doi.org/10.7567/SSDM.2011.H-7-3

[H-7-3] Fabricating a 2D Array of ϕ6-nm, High Density (1.2×10¹² cm^-2), and Periodic Silicon-Nanodisk Structures and Its Optical Characteristics for Solar Cells

M. F. Budiman^1,4, M. Igarashi^1,4, K. M. Itoh^2,4, I. Yamashita^3,4, W. Hu^1,4, S. Samukawa^1,4 (1.Tohoku Univ., 2.Keio Univ., 3.NAIST, 4.CREST-JST , Japan)

https://doi.org/10.7567/SSDM.2011.H-7-3

2011 International Conference on Solid State Devices and Materials

[H-7-3] Fabricating a 2D Array of ϕ6-nm, High Density (1.2×1012 cm-2), and Periodic Silicon-Nanodisk Structures and Its Optical Characteristics for Solar Cells

[H-7-3] Fabricating a 2D Array of ϕ6-nm, High Density (1.2×10¹² cm^-2), and Periodic Silicon-Nanodisk Structures and Its Optical Characteristics for Solar Cells