[H-7-3] Fabricating a 2D Array of ϕ6-nm, High Density (1.2×10¹² cm^-2), and Periodic Silicon-Nanodisk Structures and Its Optical Characteristics for Solar Cells

M. F. Budiman^1,4、M. Igarashi^1,4、K. M. Itoh^2,4、I. Yamashita^3,4、W. Hu^1,4、S. Samukawa^1,4 (1.Tohoku Univ.、2.Keio Univ.、3.NAIST、4.CREST-JST , Japan)

https://doi.org/10.7567/SSDM.2011.H-7-3